Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device
Patent
1998-08-04
2000-02-22
Tran, Minh Loan
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Charge transfer device
257233, 257446, 257461, H01L 27148
Patent
active
060283300
ABSTRACT:
A sensor device has a field oxide layer deposited over a substrate. The field oxide layer has opposing sharp edges that define a window. A sensor is formed in the window with a distance between the sensor and each sharp edge that defines the window. The distance forms a gap that reduces the effects of the sharp edges on the sensor, thereby reducing the current leakage from the sensor. In addition, a protective layer may be disposed over the distance and the sharp edges of the field oxide layer to further protect the sharp edges from damage that may be caused from further processing.
REFERENCES:
patent: 4717945 (1988-01-01), Yusa et al.
Chen Chao-Jung
Chen Chi-Fin
Chen Wei-Jung
Fu Chien-I
Lee Sheng-Ti
Dyna Image Corporation
Sun Raymond
Tran Minh Loan
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