CMOS integrated circuit and process for producing an electric is

Details CMOS integrated circuit and process for producing an electric is CMOS integrated circuit and process for producing an electric is

1987-07-23

1988-11-22

James, Andrew J.

357 49, 357 55, H01L 2702

Patent

active

047869607

ABSTRACT:
CMOS integrated circuit and process for the production of electric isolation zones in the integrated circuit.
According to the invention the process comprises the following stages: formation of several trenches in a silicon substrate, thermal oxidation of the substrate leading to the formation of an oxide film on the sides and bottom of the trenches, elimination of the oxide film near the bottom of the trenches and filling the trenches with a conductive material, thus constituting an electrode connected to the substrate corresponding to the circuit earth.

REFERENCES:
patent: 4044452 (1977-08-01), Abbas et al.
patent: 4454646 (1984-06-01), Joy et al.
patent: 4503451 (1985-03-01), Lund et al.
patent: 4528581 (1985-07-01), Lee
patent: 4589193 (1986-05-01), Goth et al.
patent: 4621276 (1986-11-01), Malhi
RCA Technical Note by Dennely, #876, 2/12/71.
IEDM Conference Record, 1983, pp. 23-26.
IBM Technical Disclosure Bulletin, vol. 26, No. 3A, aout 1983, pp. 940-941, New York, US; G. A. Sai-Halasz et al., "Bipolar Dynamic Ram Cell Structure with Low Soft-Error Rate".
IBM Technical Disclosure Bulletin, vol. 24, No. 7A, Dec. 1982, pp. 3350-3352, New York, US, H. H. Chao et al., "Heavy Doping Isolation for CMOS Integrated Circuits".
Electronic Design, vol. 31, No. 22, Oct. 1983, pp. 44-51, Waseca, MN., Denville, N.J., US, "CMOS Advances Clearing Speed and Density Hurdles".
IBM Technical Disclosure Bulletin, vol. 25, No. 9, Feb. 1983, pp. 4768-4772, New York, US, C. G. Jambotkar, "Method to Realize Submicrometer-Wide Images".

Affiliated with

Also associated with

Rating

CMOS integrated circuit and process for producing an electric is does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with CMOS integrated circuit and process for producing an electric is, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and CMOS integrated circuit and process for producing an electric is will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-438509