CMOS imager with enhanced transfer of charge and low voltage...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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Details

C438S066000, C438S174000, C438S289000, C257S221000, C257S122000, C257SE27131

Reexamination Certificate

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07387908

ABSTRACT:
A dopant gradient region of a first conductivity type and a corresponding channel impurity gradient below a transfer gate and adjacent a charge collection region of a CMOS imager photodiode are disclosed. The channel impurity gradient in the transfer gate provides a complete charge transfer between the charge collection region of the photodiode and a floating diffusion node. The dopant gradient region is formed by doping a region at one end of the channel with a low enhancement dopant and another region at the other end of the channel with a high enhancement dopant.

REFERENCES:
patent: 5625210 (1997-04-01), Lee et al.
patent: 5668390 (1997-09-01), Morimoto
patent: 5801416 (1998-09-01), Choi et al.
patent: 6504193 (2003-01-01), Ishiwata et al.
patent: 6521926 (2003-02-01), Sasaki
patent: 6570201 (2003-05-01), Shim
patent: 6661459 (2003-12-01), Koizumi
patent: 6744084 (2004-06-01), Fossum

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