CMOS image sensor with equivalent potential diode and method...

Details CMOS image sensor with equivalent potential diode and method... CMOS image sensor with equivalent potential diode and method...

1999-02-26

2001-02-06

Pham, Long (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S048000, C438S057000, C257S292000, C257S233000

Reexamination Certificate

active

06184055

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a solid state image sensing device capable of producing a high quality picture, and more particularly to an image sensor associated with the CMOS technology and a method for fabricating the same.
2. Description of the Related Art
With the development of the telecommunication and computer system, CMOS image sensors can be utilized in electronic imaging systems. The demand for CMOS image sensors will be much more increased in proportion to the development of digital still cameras, PC cameras, digital camcoders and PCS (personal Communication Systems), as well as standard analog and advanced digital TV and video systems. Further, the CMOS image sensor can be used in video game machines, security cameras and micro cameras for medical treatment.
FIG. 1
is a block diagram illustrating a conventional CCD (Charge Coupled Device) image sensor. As shown in
FIG. 1
, the CCD image sensor
100
includes a photoelectric conversion and charge accumulator
10
for absorbing light from an object and collecting the photogenerated charges into signal charge packets. Also, the CCD image sensor
100
includes a charge transfer region
20
to convey charge packets from the photoelectric conversion and charge accumulator
10
and a charge-to-voltage signal converter
30
to generate a voltage output of the signal charge packets as transferred through the charge transfer region
20
.
A photodiode is widely used as a photoelectric conversion and a charge accumulator. The photodiode having a PN junction forms a potential well to accumulate the charges generated by light from the object. The charges generated in the photoelectric conversion and charge accumulator
10
are trapped in the potential well of the photodiode and the trapped charges are transferred to a desired position according to the movement of the potential well. Such a charge movement is controlled by the charge transfer region
20
.
The charge-to-voltage signal converter
30
generates a voltage that is related to the transferred signal charge packets. Since electric charges generate an electric field which corresponds to an electrostatic potential. The charge in electric charge concentration as a result of introducing a signal charge packet can be measured by the charge in the electrostatic potential (i.e. the depth of the potential well). This potential well depth variation contributes to a voltage detection in the CCD image sensor.
On the other hand, after detecting the signal, the charges in the current potential well must be removed for subsequent signal detections. This removal of the charges is achieved by flushing the signal charge packet into a drain. By lowering the potential barrier between the potential well and the drain, the potential well can be “reset”.
As stated above, the conventional CCD image sensor detects the image signals through the charge coupling. The photodiode, which acts as a photosensitive plate corresponding to an image pixel, does not immediately extract photoelectric current, but extracts it after the charges are accumulated for a predetermined time into a signal packet. Accordingly, the CCD image sensor has a good sensitivity with low noise. However, since the CCD image sensor must continuously transfer photoelectric charge packets, the required driving signals are very complicated, require large voltage swing of approximately 8V to 10V, have high power consumption, and require both positive and negative power supply. Compared with submicron CMOS technology which needs about 20 photomasks, CCD technology is more complicated and also more expensive due to additional photomask processes (about 30 to 40 photomasks). In addition, since the CCD image sensor chip can not be integrated with signal processing circuitry which is typically implemented by CMOS circuitry, it is very difficult to miniaturize the size of the image sensor and implement in a wider variety of applications.
Accordingly, a wider and deeper study of the APS (active pixel sensor), which is controlled by the switching operation of a transistor, has been made with the combination of the CMOS and CCD technologies.
FIG. 2
is a circuit diagram illustrating a unit pixel of the conventional APS proposed by U.S. Pat. No. 5,471,515 of Fossum, et al. The APS uses a photogate
21
of the MOS capacitor structure to collect photoelectric charges. In order to transfer the charges generated under the photogate
21
to a floating diffusion region
22
, the APS includes a transfer transistor
23
. Also, the APS includes a reset transistor
24
, a drain diffusion region
25
, a drive transistor
26
acting as a source follower, a select transistor
27
to select a pixel array row, and a load transistor
28
.
However, in the APS as shown in
FIG. 2
, the MOS capacitor, which acts as a photosensitive plate, is made of a thick polysilicon layer so that a large fraction of blue light (with a shorter wavelength than red light) is preferentially absorbed by the polysilicon. As a result, it is difficult to obtain high quality color images at low illumination.
FIG. 3
is a cross-sectional view of the APS proposed by U.S. Pat. No. 5,625,210 of Lee, et al. U.S. Pat. No. 5,625,210 disclosed the APS with a well-known pinned photodiode. The APS in
FIG. 3
includes a pinned photodiode (PPD) to collect the photoelectric charges and a transfer transistor T
x
having an N
−
region
36
for transferring the photoelectric charges from the PPD to a floating N
+
region
37
of an output node. There is provided a reset transistor having the N
+
region
37
for one active region and also having an N
+
region
38
for another active region coupled to a power supply VDD. The impurities are introduced into a lightly doped P-epi (epitaxial) layer
32
which is grown on a more heavily doped P-type substrate
31
. The PPD is formed by a buried N
+
region
33
and a P
+
pinning region
34
. Additionally, in
FIG. 3
, each of the reference numerals
35
a
,
35
b
and
35
c
denote a transistor gate.
Specifically, as shown in FIG.
4
and in U.S. Pat. No. 5,625,210 of Lee, et al, the PPD is formed by sequential ion implantation of N
+
and P
+
impurities, using a single mask layer
41
(e.g., photoresist pattern). In particular, the PPD is formed by only one mask for both N
+
and P
+
ion implantation processes.
However, if the N
+
and P
+
ion implantation are sequentially performed using only one mask, the P
+
pinning region
34
formed above the N
+
region
33
will not be reliably electrically connected to the P-epi layer
32
. Especially, since a higher energy is used to implant the N
+
region
33
compared with the P
+
pinning region
34
, such a ion implantation processes will result in the P
+
pinning region
34
being electrically isolated from the P-epi
32
. As a result, the P
+
pinning region
34
and the P-epi layer
32
will be at different potential especially when using a low power supply of 3.3V. This difference in potential prevents the full depletion of the N
+
region
33
and, therefore, a stable pinning voltage can not be obtained. Furthermore, dopant segregation of boron atoms into the field oxide layer
39
may also contribute toward isolating the P
+
pinning region
34
from the P-epi layer
32
.
Another U.S. Pat. No. 5,567,632 of Nakashiba and Uchiya disclosed the buried (or pinned) photodiode fabricating method, which employs an inclined ion implantation and a single mask layer. In this case, it is difficult to control and monitor the ion implantation angle in mass production environment. That is, it is very difficult to measure the precise alignment of the N
+
pinning region
34
and the P
+
region
33
and to make the buried photodiodes uniform and reliable. In addition, the use of an oriented angled ion implantation of either N
+
or P
+
limits the placement of the transfer gate to a specific orientation relative to the chip and waf

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