CMOS image sensor and method for manufacturing the same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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C438S237000

Reexamination Certificate

active

06982186

ABSTRACT:
A CMOS image sensor and a method for manufacturing the same, capable of preventing an interface between an active region and a field region in the CMOS image sensor from being damaged by ion implantation. The method comprises implanting dopant ions into a source region between a gate electrode of the reset transistor and the photodiode, using an ion implantation mask that covers predetermined locations of the field region and the source region.

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patent: 6486521 (2002-11-01), Zhao et al.
patent: 2003/0086011 (2003-05-01), Wu et al.
patent: 2003/0127666 (2003-07-01), Lee
patent: 2004/0251468 (2004-12-01), Mouli et al.
patent: 2005/0023553 (2005-02-01), Rhodes
patent: 2005/0064665 (2005-03-01), Han
patent: 2001-0061349 (2001-07-01), None
patent: 2003-0052639 (2003-06-01), None
patent: 2001-0061353 (2001-07-01), None

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