CMOS image sensor and method for fabricating the same

Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit

Reexamination Certificate

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Details

C257S435000, C438S072000, C250S208100

Reexamination Certificate

active

07339155

ABSTRACT:
A CMOS image sensor and a method for fabricating the same are disclosed, in which light-shielding layers are formed in trenches to improve photosensitivity of the image sensor and simplify its process steps. The CMOS image sensor includes a plurality of photodiodes formed in a semiconductor substrate at constant intervals, an interlayer dielectric layer formed on the semiconductor substrate including the photodiodes, a plurality of metal lines formed in the interlayer dielectric layer, a plurality of light-shielding layers formed in the interlayer dielectric layer to correspond to the metal lines, and microlenses formed over the interlayer dielectric layer to correspond to portions between the respective light-shielding layers.

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patent: 2005/0056901 (2005-03-01), Kuriyama
patent: 2005/0236653 (2005-10-01), Lim
patent: 2006/0046204 (2006-03-01), Ono et al.
patent: 2006/0197169 (2006-09-01), Cole

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