Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2004-10-01
2008-10-07
Smith, Matthew S. (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S057000, C438S073000, C438S097000, C257SE21585, C257SE25032
Reexamination Certificate
active
07432125
ABSTRACT:
A CMOS image sensor-manufacturing method includes forming a photodiode on a substrate, forming an insulating layer over the substrate, forming a contact hole in the insulating layer, and forming a gate terminal over the insulating layer. The gate terminal is connected to the photodiode through the contact hole.
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S. Wolf and R.N. Tauber, Silicon Processing for the VLSI Era vol. 1—Process Technology, Copyright 2000, Lattice Press, pp. 488-490, 655.
Dongbu Electronics Co. Ltd.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Smith Matthew S.
Stark Jarrett J
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