Optical waveguides – With optical coupler – Particular coupling structure
Reexamination Certificate
2008-06-30
2010-06-15
Petkovsek, Daniel (Department: 2874)
Optical waveguides
With optical coupler
Particular coupling structure
C385S014000, C385S088000, C385S131000, C438S031000, C438S033000, C216S002000, C257SE21214
Reexamination Certificate
active
07738753
ABSTRACT:
An optoelectronic circuit fabrication method and integrated circuit apparatus fabricated therewith. Integrated circuits are fabricated with an integral optical coupling transition to efficiently couple optical energy from an optical fiber to an integrated optical waveguide on the integrated circuit. Layers of specific materials are deposited onto a semiconductor circuit to support etching of a trench to receive an optical coupler that performs proper impedance matching between an optical fiber and an on-circuit optical waveguide that extends part way into the transition channel. A silicon based dielectric that includes at least a portion with a refractive index substantially equal to a section of the optical fiber is deposited into the etched trench to create the optical coupler. Silicon based dielectrics with graded indices are also able to be used. Chemical mechanical polishing is used finalize preparation of the optical transition and integrated circuit.
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Japan Office Action dated Aug. 27, 2009.
Assefa Solomon
Jahnes Christopher
Vlasov Yurii
Giunta Jeffrey
International Business Machines - Corporation
Petkovsek Daniel
Shimokaji & Associates P.C.
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