Cluster tool dry cleaning system

Details Cluster tool dry cleaning system Cluster tool dry cleaning system

1992-01-15

1993-07-20

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34 1Y, 34 17, 34 60, 432124, 392418, F26B 328

Patent

active

052282066

ABSTRACT:
A cluster tool module for dry process cleaning of substrates. A substrate process reactor body assembly includes a gas inlet and gas outlet on opposing sides of a ceramic reactor body. A linear xenon flash lamp in a light bar provides a UV source for uniform distribution over a substrate by use of a light filter. Infrared heating is also provided by a plurality of infrared lamps in the light box. A moisturizer is provided for safe introduction of water vapor into the gas flow.

REFERENCES:
patent: 4721836 (1988-01-01), Zeisse et al.
patent: 4857704 (1989-08-01), Jannot et al.
patent: 5019689 (1991-05-01), Bollier et al.

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