Cluster tool and transfer control method

Details Cluster tool and transfer control method Cluster tool and transfer control method

2007-07-17

2007-07-17

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C414S939000

Reexamination Certificate

active

11129327

ABSTRACT:
At a time Tp when a wafer W is transferred into either a load lock chamber LL1or LL2, periods PSL for the load lock chambers LL1and LL2to get ready to permit a transfer of a next wafer W thereinto are calculated based on a timing for exchange of wafers W between the load lock chamber LL1or LL2and a loader module LM. When the periods PSL are calculated, a loader arm LA1or LA2selects a next wafer W having the shortest period to get ready to be transferable into the load lock chamber LL1or LL2, from load ports LP1to LP3. This improves transfer delay in a cluster tool provided with the load lock chambers.

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