Cluster tool and method for controlling transport

Details Cluster tool and method for controlling transport Cluster tool and method for controlling transport

2005-11-29

2005-11-29

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C414S805000, C414S217000, C414S939000

Reexamination Certificate

active

06970770

ABSTRACT:
At a time Tp when a wafer W is transferred into either a load lock chamber LL1or LL2, periods PSL for the load lock chambers LL1and LL2to get ready to permit a transfer of a next wafer W thereinto are calculated based on a timing for exchange of wafers W between the load lock chamber LL1or LL2and a loader module LM. When the periods PSL are calculated, a loader arm LA1or LA2selects a next wafer W having the shortest period to get ready to be transferable into the load lock chamber LL1or LL2, from load ports LP1to LP3. This improves transfer delay in a cluster tool provided with the load lock chambers.

REFERENCES:
patent: 5019233 (1991-05-01), Blake et al.
patent: 5357115 (1994-10-01), Asakawa et al.
patent: 5388944 (1995-02-01), Takanabe et al.
patent: 5478195 (1995-12-01), Usami
patent: 5685684 (1997-11-01), Kato et al.
patent: 6244811 (2001-06-01), Kroeker et al.
patent: 6428262 (2002-08-01), Vanderpot et al.
patent: 6481956 (2002-11-01), Hofmeister
patent: 6519504 (2003-02-01), Soraoka et al.
patent: 6719517 (2004-04-01), Beaulieu et al.
patent: 6722835 (2004-04-01), Stevens et al.
patent: 6746195 (2004-06-01), Shirai
patent: 2000-332083 (2000-11-01), None
patent: 2001-53131 (2001-02-01), None
patent: 2001-358195 (2001-12-01), None

Affiliated with

Also associated with

Rating

Cluster tool and method for controlling transport does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cluster tool and method for controlling transport, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cluster tool and method for controlling transport will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3478087