Cluster tool and method for controlling transport

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling

Reexamination Certificate

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Details

C414S805000, C414S217000, C414S939000

Reexamination Certificate

active

06970770

ABSTRACT:
At a time Tp when a wafer W is transferred into either a load lock chamber LL1or LL2, periods PSL for the load lock chambers LL1and LL2to get ready to permit a transfer of a next wafer W thereinto are calculated based on a timing for exchange of wafers W between the load lock chamber LL1or LL2and a loader module LM. When the periods PSL are calculated, a loader arm LA1or LA2selects a next wafer W having the shortest period to get ready to be transferable into the load lock chamber LL1or LL2, from load ports LP1to LP3. This improves transfer delay in a cluster tool provided with the load lock chambers.

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patent: 2000-332083 (2000-11-01), None
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patent: 2001-358195 (2001-12-01), None

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