Cluster source for nonvolatile species, having independent tempe

Details Cluster source for nonvolatile species, having independent tempe Cluster source for nonvolatile species, having independent tempe

1987-02-20

1989-08-15

Pianalto, Bernard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

118 501, 118620, 118726, B05C 1100

Patent

active

048564575

ABSTRACT:
A cluster source includes at least two separate zones, each of whose temperatures can be independently controlled. A crucible contains the species to be evaporated, and is heated to a sufficiently high temperature that efficient evaporation is achieved. A cluster formation surface is adjacent to the crucible and receives evaporated atoms from the crucible. Clusters are produced at the cluster formation surface from the evaporated atoms, and the cluster formation surface is maintained at a temperature lower than that of the crucible to encourage good formation efficiency. Optionally, a third zone can be provided for ejection of the clusters, which is maintained at a higher temperature than the cluster formation surface to prevent formation of droplets of the evaporant.

REFERENCES:
patent: 4217855 (1980-08-01), Takagi
patent: 4286545 (1981-09-01), Takagi et al.

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