Cluster ion plating method for producing electrically conductive

Details Cluster ion plating method for producing electrically conductive Cluster ion plating method for producing electrically conductive

1988-04-14

1989-01-03

Morgenstern, Norman

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

20419231, B05D 306, C23C 1400

Patent

active

047956569

ABSTRACT:
A carbon film having a large electrical conductivity is produced at a comparatively low substrate temperature by a method comprising forming the carbon film from a hydrocarbon by an ion beam method and heating the substrate at a temperature of 400.degree. C. to 1,200.degree. C.

REFERENCES:
patent: 4217855 (1980-08-01), Takagi
patent: 4571348 (1986-02-01), Troxell

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