Cloverleaf microgyroscope with electrostatic alignment and...

Measuring and testing – Instrument proving or calibrating – Angle – direction – or inclination

Reexamination Certificate

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C073S504020, C073S504040

Reexamination Certificate

active

10843139

ABSTRACT:
A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthxof the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis) Vthy˜0. Closed loop drive axis torque, Vtxmaintains a constant drive axis amplitude signal, Vthx. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either Vthy/Vtyor Vtnx/Vtx. A quadrature signal noise level, or difference in natural frequencies estimated from measurements of the transfer functions is used to detect residual mistuning, that is corrected to zero by a second electrostatic bias voltage adjustment.

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patent: 6584845 (2003-07-01), Gutierrez et al.
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patent: 9745702 (1997-04-01), None
Geiger, W, et al., New Designs of Macromachined Vibrating Rate Gyroscopes with Decoupled Oscillation Modes, 1997 International Conference on Solid-State Sensors and Actuators, Jun. 16, 1997, pp. 1129-1132, vol. 2, Chicago, Illinois.
Song, H. et al., Wafter Level Vacuum Packaged De-coupled Verticle Gyroscope by Proceedings of the IEEE, 13th Annual International Conference on Micro Electro Mechanical Systems, Jan. 23, 2000, pp. 520-524, Miyazaki, Japan.

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