Closing module for an optical arrangement

Details Closing module for an optical arrangement Closing module for an optical arrangement

2008-05-06

2008-05-06

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S815000

Reexamination Certificate

active

07369332

ABSTRACT:
Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element (3) having a first axis (3.1) and a holding device (2) that fixes the closing element (3) at least in the direction of the first axis (3.1), the holding device (2) being configured for radial clamping of the closing element (3).

REFERENCES:
patent: 6318912 (2001-11-01), Shono et al.
patent: 6400516 (2002-06-01), Spinali
patent: 6509956 (2003-01-01), Kobayashi
patent: 6867923 (2005-03-01), Singer et al.
patent: 2002/0027725 (2002-03-01), Schletterer
patent: 2003/0076602 (2003-04-01), Nishikawa
patent: 2003/0234989 (2003-12-01), Oshino et al.
patent: 2004/0012861 (2004-01-01), Yamaguchi
patent: 37 51 485 (1996-02-01), None
patent: 100 30 005 (2001-12-01), None
patent: 101 39 805 (2002-10-01), None
patent: 101 40 608 (2003-08-01), None
patent: 1 339 099 (2003-08-01), None
patent: WO 02/065183 (2002-08-01), None
Inernational Preliminary Report on Patentability for PCT/EP2005/003875 dated Oct. 19, 2006.
Written Opinion of the International Searching Authority for PCT/EP2005/003875 dated Oct. 19, 2006.

Affiliated with

Also associated with

Rating

Closing module for an optical arrangement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Closing module for an optical arrangement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Closing module for an optical arrangement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2810995