Closed-loop silicon production

Details Closed-loop silicon production Closed-loop silicon production

2010-03-30

2011-10-04

Silverman, Stanley (Department: 1736)

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

C423S348000, C423S341000, C423S342000

Reexamination Certificate

active

08029756

ABSTRACT:
A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.

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