Closed loop process for producing polycrystalline silicon and fu

Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing

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423349, C01B 3302

Patent

active

059102950

ABSTRACT:
A closed loop process for producing electronic grade polycrystalline silicon from silane and fume silica from silicon tetrachloride comprises the steps of:

REFERENCES:
patent: 4092446 (1978-05-01), Padovani et al.

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