Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
Patent
1997-11-10
1999-06-08
Lewis, Michael
Chemistry of inorganic compounds
Silicon or compound thereof
Oxygen containing
423349, C01B 3302
Patent
active
059102950
ABSTRACT:
A closed loop process for producing electronic grade polycrystalline silicon from silane and fume silica from silicon tetrachloride comprises the steps of:
REFERENCES:
patent: 4092446 (1978-05-01), Padovani et al.
Hendrickson Stuart L.
Lewis Michael
MEMC Electronic Materials , Inc.
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