Closed-loop feedback control positioning stage

Details Closed-loop feedback control positioning stage Closed-loop feedback control positioning stage

2007-03-06

2007-03-06

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S316010, C310S317000, C310S323010, C310S323170, C310S328000

Reexamination Certificate

active

11027192

ABSTRACT:
Provided is a closed-loop feedback control positioning stage comprising at least one block formed therein, a plurality of hinge mechanisms for attaching the block in the stage, at least one actuator formed in the block, the actuator adapted to bend for moving the block in at least one direction, and a plurality of strain gauges each attached in a corresponding hinge mechanism for measuring its strain. The invention can repeatedly position the block at the moved location for carrying out a highly precise positioning of the stage.

REFERENCES:
patent: 5252884 (1993-10-01), Dona
patent: 6555829 (2003-04-01), Spallas et al.
patent: 6888289 (2005-05-01), Heilig et al.
patent: 6995499 (2006-02-01), Hwang
patent: 7047794 (2006-05-01), Hajduk et al.
patent: 2002/0149758 (2002-10-01), Poon
patent: 62-152380 (1987-07-01), None

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