Closed loop circuit for a differential capacitive sensor

Details Closed loop circuit for a differential capacitive sensor Closed loop circuit for a differential capacitive sensor

1992-01-31

1995-06-27

Horabik, Michael

Communications: electrical

Continuously variable indicating

With particular transmitter

34037043, 324661, 324679, 324684, 73517R, 73517B, H01G 516

Patent

active

054283523

ABSTRACT:
A closed loop circuit for controlling a differential capacitive sensor has been provided wherein the differential capacitive sensor includes a rigid top and bottom plate, and a movable middle plate. The closed loop circuit has a clock period which is divided into three separate sub-periods: the force period, the reset period and the sense period. During the force period, a top or a bottom electrostatic force is applied such that the middle plate is attracted towards the top plate or the bottom plate, respectively. During the reset period, substantially equal voltages are applied to all three plates. Finally, during the sense period, the voltage on the middle plate is sensed to determine whether the middle plate is closer to the top plate or to the bottom plate. Further, the result during the sense period will be utilized to determine whether to apply a top force or a bottom force during the next subsequent force period.

REFERENCES:
patent: 4054833 (1977-10-01), Briefer
patent: 5048165 (1991-08-01), Cadwell
patent: 5095752 (1992-03-01), Suzuki et al.
Henrion et al; "Wide Dynamic Range Direct Digital Accelerometer" IEEE Solid State Sensor and Actuator Workshop; 1990; pp. 153-157.

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