Closed-loop capacitive accelerometer with spring constraint

Details Closed-loop capacitive accelerometer with spring constraint Closed-loop capacitive accelerometer with spring constraint

1989-02-28

1990-05-29

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517AV, G01P 1502, H01G 700

Patent

active

049300431

ABSTRACT:
A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.

REFERENCES:
patent: 4244225 (1981-01-01), Greenwood
patent: 4574327 (1986-03-01), Wilner
patent: 4609968 (1986-09-01), Wilner
patent: 4658647 (1987-04-01), Shintani et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4699006 (1987-10-01), Boxenhorn

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