Closed drift ion source

Details Closed drift ion source Closed drift ion source

2005-07-19

2005-07-19

Patel, Nimeshkumar D. (Department: 2879)

Electric lamp and discharge devices

With positive or negative ion acceleration

C250S424000, C250S425000, C250S427000, C250S42300F, C315S111910, C315S111810, C313S161000, C313S162000, C313S231010, C313S231310, C313S231410, C118S7230MW, C118S7230ME

Reexamination Certificate

active

06919672

ABSTRACT:
A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed on the open end of the channel and extends therefrom in a second direction, where the first direction is opposite to the second direction. The distal ends of the first magnetic pole and the second magnetic pole define a gap comprising the opening in the first end. An anode is disposed within the channel. A primary magnetic field line is disposed between the first magnetic pole and the second magnetic pole, where that primary magnetic field line has a mirror field greater than 2.

REFERENCES:
patent: 4277304 (1981-07-01), Horiike et al.
patent: 5763989 (1998-06-01), Kaufman
patent: 5892329 (1999-04-01), Arkhipov et al.
patent: 5945781 (1999-08-01), Valentian
patent: 6215124 (2001-04-01), King
Shabalin, et al., “Industrial Ion Sources and Their Application for DLC Coating”, 1999, pp. 1-6; Keem, High Current Denisty Anode Layer Ion Source; 2001, pp. 1-6.
Advanced Energy Industries, Inc., “Round and Linear Ion Beam Sources”, 2000; Kaufman, et al., “End-Hall Ion Source”, Jul./Aug. 1987, pp. 2081-2084.

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