Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2011-07-26
2011-07-26
Wilkins, III, Harry D (Department: 1723)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S297010, C204S297100, C204S297140, C204S279000
Reexamination Certificate
active
07985325
ABSTRACT:
Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
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Buckalew Bryan
Ganesan Kousik
Ghongadi Shantinath
Hawkins Jeff
He Zhian
Knobbe Martens Olson & Bear LLP
Novellus Systems Inc.
Wilkins, III Harry D
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