Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-02-09
2011-12-27
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
Reexamination Certificate
active
08085381
ABSTRACT:
A megasonic immersion lithography exposure apparatus includes an optical transfer chamber for containing an exposure liquid, at least one megasonic plate operably engaging said optical transfer chamber for propagating sonic waves through the exposure liquid, and an optical system provided adjacent to said optical transfer chamber for projecting light through a mask and said exposure liquid and onto a wafer.
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Kawai Hidemi
Novak W Thomas
Watson Douglas C
Kim Peter B
Liu Chia-how Michael
Nikon Corporation
Oliff & Berridg,e PLC
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