Cleaning water production system

Details Cleaning water production system Cleaning water production system

1996-06-11

1997-03-25

Nessler, Cynthia L.

Liquid purification or separation

With gas separator

210259, 210266, 2101951, 210143, C02F 142

Patent

active

056140886

ABSTRACT:
A cleaning water production system in which pure water from a primary pure water production system is treated in a subsystem to produce ultrapure water, which is then sent to points of use through supply pipes, the point of use being connected to the subsystem through return pipes for returning unused cleaning water to the subsystem, wherein an extra-ultrapure water production system is provided at a distal end portion of the supply pipes near the point of use for supplying extra-ultrapure water to the points of use.

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