Cleaning system for static charged semiconductor wafer surface

Details Cleaning system for static charged semiconductor wafer surface Cleaning system for static charged semiconductor wafer surface

1986-04-22

1987-07-07

Moore, Chris K.

Brushing, scrubbing, and general cleaning

Electrostatic cleaning

15306R, 15316R, 15404, A47L 514

Patent

active

046777040

ABSTRACT:
A system for removing extremely fine specks of contaminants from a surface by means of applying air-borne vibrations to the speck coincident with creation of a neutral static charge acting on the speck.

REFERENCES:
patent: 3668008 (1972-06-01), Severynse
patent: 3939526 (1976-02-01), Mania et al.
patent: 4198061 (1980-04-01), Dunn
patent: 4268934 (1981-05-01), Testone
patent: 4364147 (1982-12-01), Biedermann et al.
patent: 4454621 (1984-06-01), Testone
patent: 4461651 (1984-07-01), Hall

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