Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1998-05-26
2000-09-05
Gulakowski, Randy
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
134 13, 134 2, 134 6, 134 254, 134 31, 510175, 510405, 510407, 510412, B08B 300
Patent
active
061137081
ABSTRACT:
A component (10 or 12) of a flat-panel display is cleaned with a fluid having a mole-fraction dominant constituent. The cleaning operation is performed by subjecting the component to the cleaning fluid while its absolute pressure exceeds the absolute pressure at the triple point of the dominant constituent and is at least 20% of the absolute pressure value at the critical point of the dominant constituent. The temperature and pressure of the cleaning fluid are typically controlled in a direction toward the supercritical state of the dominant constituent.
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Crane Scott J.
Hopple George B.
Mackey Bob L.
Porter John D.
Candescent Technologies Corporation
Carrillo S.
Gulakowski Randy
Hewlett--Packard Company
Meetin Ronald J.
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