Cleaning method utilizing degassed cleaning liquid with applied

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...

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134 21, 134184, B08B 312

Patent

active

060398140

ABSTRACT:
A cleaning method comprising the steps of degassing gas dissolved in a cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Also included, is a cleaning method comprising the steps of: degassing gas dissolved in a surface-active agent-containing cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Water vapor may be used to sweep gas from a degassing device.

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patent: 5427622 (1995-06-01), Stanasolovich et al.
patent: 5447171 (1995-09-01), Shibano
patent: 5656097 (1997-08-01), Olesen et al.

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