Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1997-07-03
2000-03-21
Gulakowski, Randy
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 21, 134184, B08B 312
Patent
active
060398140
ABSTRACT:
A cleaning method comprising the steps of degassing gas dissolved in a cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Also included, is a cleaning method comprising the steps of: degassing gas dissolved in a surface-active agent-containing cleaning liquid therefrom to a value not more than 5 ppm, loading ultrasonics with a frequency of 1 MHz or more to the cleaning liquid, and cleaning an object for cleaning with the cleaning liquid. Water vapor may be used to sweep gas from a degassing device.
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Nitta Takahisa
Ohmi Tadahiro
Chaudhry Saeed
Gulakowski Randy
Kabushiki Kaiha Ultraclean Technology Research Institute
Knuth Randall J.
Tadahiro OHMI
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