Cleaning method using ammonium persulphate to remove slurry part

Details Cleaning method using ammonium persulphate to remove slurry part Cleaning method using ammonium persulphate to remove slurry part

1998-06-22

2000-07-18

Gulakowski, Randy

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 32, 134 34, B08B 700

Patent

active

060902140

ABSTRACT:
A chemical mechanical cleaning method utilizes an ammonium persulphate solution with simultaneous mechanical brushing to remove residual slurry particles from copper surfaces. The pH of the solution is selected to electrostatically repel charged slurry particles from the copper surface.

REFERENCES:
patent: 3954498 (1976-05-01), Flowers
patent: 4481071 (1984-11-01), Anderson et al.
patent: 4632727 (1986-12-01), Nelson
patent: 4817652 (1989-04-01), Liu et al.
patent: 5030373 (1991-07-01), Kimura et al.
patent: 5078801 (1992-01-01), Malik
patent: 5130275 (1992-07-01), Dion
patent: 5225034 (1993-07-01), Yu et al.
patent: 5277756 (1994-01-01), Dion
patent: 5320706 (1994-06-01), Blackwell
patent: 5485644 (1996-01-01), Shinbara et al.
patent: 5551986 (1996-09-01), Jain
patent: 5607718 (1997-03-01), Sasaki et al.
patent: 5624501 (1997-04-01), Gill, Jr.
patent: 5626681 (1997-05-01), Nakano et al.
patent: 5639311 (1997-06-01), Holley et al.
patent: 5656097 (1997-08-01), Olesen et al.
patent: 5684660 (1997-11-01), Gray et al.
patent: 5704987 (1998-01-01), Huynh et al.
patent: 5709755 (1998-01-01), Kuo et al.
patent: 5735963 (1998-04-01), Obeng
patent: 5846336 (1998-12-01), Skrovan
patent: 5868863 (1999-02-01), Hymes et al.

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