Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate
2005-03-08
2005-03-08
Carrillo, Sharidan (Department: 1746)
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
C134S001000, C134S002000, C134S019000, C134S022100, C134S022120, C134S022130, C134S022140, C134S022170, C134S022180, C134S022190, C134S028000, C134S029000, C134S030000, C134S034000, C134S035000, C134S036000
Reexamination Certificate
active
06863740
ABSTRACT:
Disclosed is a cleaning method of a ceramic member, which permits removing with a high accuracy the contaminants from a ceramic member contaminated with the contaminant. The cleaning method comprises the steps of processing the contaminated ceramic member with an alkaline chemical liquid having a pH value not smaller than 10 in the presence of an ultrasonic wave, processing the ceramic member processed with the alkaline chemical liquid with a prescribed acidic chemical liquid in the presence of an ultrasonic wave, and heating the ceramic member processed with the acidic chemical liquid under temperatures not lower than 1,000° C.
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Hatakeyama Hiroshi
Moriyama Shirou
Ohtaki Hiromichi
Carrillo Sharidan
Frishauf Holtz Goodman & Chick P.C.
Nihon Ceratec Co. Ltd.
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