Cleaning method of ceramic member

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents

Reexamination Certificate

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C134S001000, C134S002000, C134S019000, C134S022100, C134S022120, C134S022130, C134S022140, C134S022170, C134S022180, C134S022190, C134S028000, C134S029000, C134S030000, C134S034000, C134S035000, C134S036000

Reexamination Certificate

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06863740

ABSTRACT:
Disclosed is a cleaning method of a ceramic member, which permits removing with a high accuracy the contaminants from a ceramic member contaminated with the contaminant. The cleaning method comprises the steps of processing the contaminated ceramic member with an alkaline chemical liquid having a pH value not smaller than 10 in the presence of an ultrasonic wave, processing the ceramic member processed with the alkaline chemical liquid with a prescribed acidic chemical liquid in the presence of an ultrasonic wave, and heating the ceramic member processed with the acidic chemical liquid under temperatures not lower than 1,000° C.

REFERENCES:
patent: 3033710 (1962-05-01), Hightower et al.
patent: 4713119 (1987-12-01), Earhart et al.
patent: 5837662 (1998-11-01), Chai et al.
patent: 6165279 (2000-12-01), Tsao et al.
patent: 6230720 (2001-05-01), Yalamanchili et al.
patent: 20040045574 (2004-03-01), Tan
patent: 20040060579 (2004-04-01), Kim et al.
patent: 2003-55070 (2003-02-01), None
patent: 2003-055070 (2003-02-01), None

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