Cleaning method for turbo molecular pump

Details Cleaning method for turbo molecular pump Cleaning method for turbo molecular pump

2008-03-24

2011-11-22

Barr, Michael (Department: 1711)

Cleaning and liquid contact with solids

Processes

Hollow work, internal surface treatment

C134S001000, C134S008000, C134S019000, C134S022180

Reexamination Certificate

active

08062432

ABSTRACT:
A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate processing apparatus. A vaporizing gas that vaporizes foreign matter attached to an internal surface of the turbo molecular pump is supplied toward the foreign matter.

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