Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Patent
1997-11-26
1999-04-20
El-Arini, Zeinab
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
134 10, 134 2, 134 38, 134 40, B08B 304, C23G 500
Patent
active
058948538
ABSTRACT:
A cleaning method whereby a cleaning liquid used for cleaning in one cleaning stage is mixed after the one cleaning stage with a cleaning liquid used for cleaning in a rear cleaning stage. The flow rate of the one cleaning stage being greater than that of the cleaning liquid used for cleaning in the rear cleaning stage.
REFERENCES:
patent: 4654089 (1987-03-01), Singelyn et al.
patent: 4861385 (1989-08-01), Yagishita
patent: 4997490 (1991-03-01), Vetter et al.
patent: 5089084 (1992-02-01), Chhabra et al.
patent: 5314780 (1994-05-01), Takei et al.
Fujisaki Tatsuo
Takada Takeshi
Takeyama Yoshifumi
Tsuzuki Koji
Canon Kabushiki Kaisha
El-Arini Zeinab
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