Cleaning method and cleaning apparatus

Details Cleaning method and cleaning apparatus Cleaning method and cleaning apparatus

1994-12-12

1997-01-14

Achutamurthy, Ponnathapura

Cleaning and liquid contact with solids

Processes

Including regeneration, purification, recovery or separation...

134 1, 134 10, 134 19, 134 26, 134 30, 134 31, 134 32, 134 40, 134 42, B08B 308, B08B 310, B08B 312, B08B 500

Patent

active

055935079

ABSTRACT:
A part subjected to cleaning is cleaned or rinsed with a cleaning agent or rinsing agent having a nonaqueous type solvent or a hydrophilic solvent as a main component thereof. Then the cleaning agent or rinsing agent adhering to the cleaned or rinsed part subjected to cleaning is removed with a cleaning agent having perfluorocarbon as a main component thereof or the vapor of the cleaning agent. The part is subsequently dried. Otherwise, after the part subjected to cleaning has been cleaned with an aqueous type solvent or wash with water, the part is cleaned and dried with a cleaning agent having perfluorocarbon as a main component thereof or the vapor of the cleaning agent. The cleaning agent having perfluorocarbon as a main component thereof or the vapor of the cleaning agent can be used for cleaning or rinsing the part subjected to cleaning.

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