Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Reexamination Certificate
2005-05-31
2005-05-31
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With heating, cooling or heat exchange means
C134S148000, C134S153000, C134S172000, C134S902000
Reexamination Certificate
active
06899110
ABSTRACT:
The present invention can remove particles such as dust by flowing solvent gas such as CO2through a line filter and eject it from a nozzle so as to be converted to solid particles or liquid droplets and eject to a workpiece to be cleaned so as to clean particles or organic materials. It is possible to make the solvent to a solid particle or liquid droplet by adjusting a gap between the nozzle and the workpiece to be cleaned; thus, it is possible to select the most preferable state according to the extent of the adhesion of organic material to the workpiece to be cleaned. Also, it is possible to remove particles such dust in the solvent by a line filter; thus, it is not necessary to use highly pure expensive solvent, and it is possible to reduce the running cost of the apparatus.
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Hoenig, S.A., “Cleaning Surfaces with Dry Ice”,Compressed Air MagazineAug., 1986, pp. 22-25.
Habaya Kurao
Iwasaki Motoaki
Shiroma Takahiro
Yano Tatsuro
Yoshida Takashi
Fuji Electric & Co., Ltd.
Hoffmann & Baron , LLP
Stinson Frankie L.
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