Cleaning method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...

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134 2, 134 3, 134 26, 134 31, 134 36, 1341021, 1341022, B08B 300, B08B 312, B08B 500, B03C 2300

Patent

active

060823739

ABSTRACT:
Provided is a cleaning method for effectively removing particles on the surface of an object to be cleaned. This cleaning method includes dissolving oxygen into deaerated pure water to prepare a cleaning fluid, and cleaning an object to be cleaned by bringing the object into contact with the cleaning fluid to which ultrasonic vibration is being applied.

REFERENCES:
patent: 5261966 (1993-11-01), Mashimo et al.
patent: 5322082 (1994-06-01), Shibano
patent: 5383483 (1995-01-01), Shibano
patent: 5415191 (1995-05-01), Mashimo et al.
patent: 5447171 (1995-09-01), Shibano
patent: 5735934 (1998-04-01), Spears
patent: 5759751 (1998-06-01), Shimizu et al.
patent: 5911836 (1999-06-01), Hada et al.

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