Cleaning method

Details Cleaning method Cleaning method

1998-07-02

2000-07-04

El-Arini, Zeinab

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 2, 134 3, 134 26, 134 31, 134 36, 1341021, 1341022, B08B 300, B08B 312, B08B 500, B03C 2300

Patent

active

060823739

ABSTRACT:
Provided is a cleaning method for effectively removing particles on the surface of an object to be cleaned. This cleaning method includes dissolving oxygen into deaerated pure water to prepare a cleaning fluid, and cleaning an object to be cleaned by bringing the object into contact with the cleaning fluid to which ultrasonic vibration is being applied.

REFERENCES:
patent: 5261966 (1993-11-01), Mashimo et al.
patent: 5322082 (1994-06-01), Shibano
patent: 5383483 (1995-01-01), Shibano
patent: 5415191 (1995-05-01), Mashimo et al.
patent: 5447171 (1995-09-01), Shibano
patent: 5735934 (1998-04-01), Spears
patent: 5759751 (1998-06-01), Shimizu et al.
patent: 5911836 (1999-06-01), Hada et al.

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