Cleaning member, cleaning method, and device manufacturing...

Details Cleaning member, cleaning method, and device manufacturing... Cleaning member, cleaning method, and device manufacturing...

2011-04-19

2011-04-19

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Processes

With work or work parts movable during treatment

C134S034000

Reexamination Certificate

active

07927428

ABSTRACT:
A method of cleaning at least a portion of an exposure system's substrate-holding member. The method involves using the substrate-holding member to hold a cleaning member having substantially the same external shape as a substrate processed with the exposure system. The outer diameter of the cleaning member is smaller than the outer diameter of the substrate processed with the exposure system, and as a result, when the substrate-holding member holds the cleaning member, a gap is provided from the outer diameter of the cleaning member to another member which surrounds the substrate when the substrate-holding member is used to hold a substrate. Liquid is supplied to a space over the gap in order to clean at least a portion of the substrate-holding member.

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