Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent
1998-02-25
1999-11-23
Kopec, Mark
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
134 1, 134 2, 134 3, 252 793, 2521861, 438753, 438756, C11D 710, C11D 718, C03C 2300, C09K 1308
Patent
active
059900601
ABSTRACT:
A cleaning method and a cleaning device which require an extremely short time for processing and also insure and extremely high cleaning effect. Foreign materials deposited on a substrate are removed with a cleaning liquid prepared by mixing a basic and water-soluble fluoride and an oxidizing agent in pure water.
REFERENCES:
patent: 3979241 (1976-09-01), Maeda et al.
patent: 4917123 (1990-04-01), McConnell et al.
patent: 5679171 (1997-10-01), Saga et al.
patent: 5858106 (1999-01-01), Ohmi et al.
Tadahiro Ohmi, "Ultraclean ULSI Technology", Baifukan, pp. 226-223, Dec. 1995.
Jizaimaru Takayuki
Nitta Takahisa
Ohmi Tadahiro
Omae Shunkichi
Knuth Randall J.
Kopec Mark
Ohmi Tadahiro
Petruncio John M
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