Cleaning/drying apparatus and cleaning/drying method

Details Cleaning/drying apparatus and cleaning/drying method Cleaning/drying apparatus and cleaning/drying method

2011-01-04

2011-01-04

Barr, Michael (Department: 1711)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S095300, C134S103200, C134S135000, C134S137000, C134S198000, C134S200000, C134S902000, C034S073000, C034S074000

Reexamination Certificate

active

07861731

ABSTRACT:
A cleaning/drying apparatus including a vapor area where vapor of an organic solvent inside the cleaning/drying apparatus is generated, an ejecting part configured to eject the organic solvent onto a cleaning/drying target, a first detecting part configured to determine whether the temperature of the cleaning/drying target is a first temperature equivalent to a temperature of the vapor in the vapor area, a second detecting part configured to determine whether the temperature of the cleaning/drying target is a second temperature enabling the organic solvent to condense on a surface of the cleaning/drying target, and a cleaning/drying control part configured to drive the ejecting part to eject the organic solvent when the first detecting part detects that the temperature of the cleaning/drying target is the first temperature and stop the ejection when the second detecting part detects that the temperature of the cleaning/drying target is the second temperature.

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