Cleaning device and a lithographic apparatus cleaning method

Details Cleaning device and a lithographic apparatus cleaning method Cleaning device and a lithographic apparatus cleaning method

2011-03-08

2011-03-08

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Apparatus

Movably mounted fluid-holding receptacles

C134S135000, C134S16600C

Reexamination Certificate

active

07900641

ABSTRACT:
A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.

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