Cleaning and liquid contact with solids – Apparatus – With non-impelling fluid deflector or baffle other than...
Reexamination Certificate
2011-01-11
2011-01-11
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Apparatus
With non-impelling fluid deflector or baffle other than...
C134S104200, C134S186000
Reexamination Certificate
active
07866330
ABSTRACT:
A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.
REFERENCES:
patent: 3573975 (1971-04-01), Dhaka et al.
patent: 3648587 (1972-03-01), Stevens
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4390273 (1983-06-01), Loebach et al.
patent: 4396705 (1983-08-01), Akeyama et al.
patent: 4405701 (1983-09-01), Banks et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 4509852 (1985-04-01), Tabarelli et al.
patent: 5039349 (1991-08-01), Schoeppel
patent: 5040020 (1991-08-01), Rauschenbach et al.
patent: 5121256 (1992-06-01), Corle et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5900354 (1999-05-01), Batchelder
patent: 6191429 (2001-02-01), Suwa
patent: 6236634 (2001-05-01), Lee et al.
patent: 6496257 (2002-12-01), Taniguchi et al.
patent: 6600547 (2003-07-01), Watson et al.
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 7014966 (2006-03-01), Pawloski et al.
patent: 7050146 (2006-05-01), Duineveld et al.
patent: 7091502 (2006-08-01), Gau et al.
patent: 7195860 (2007-03-01), Endo et al.
patent: 7224427 (2007-05-01), Chang et al.
patent: 7224434 (2007-05-01), Tokita
patent: 7262422 (2007-08-01), Subramanian et al.
patent: 7268961 (2007-09-01), Niwa et al.
patent: 7307263 (2007-12-01), Bakker et al.
patent: 7315033 (2008-01-01), Pawloski et al.
patent: 7317504 (2008-01-01), De Smit et al.
patent: 7365828 (2008-04-01), Takamura
patent: 7385670 (2008-06-01), Compen et al.
patent: 7405417 (2008-07-01), Stevens et al.
patent: 7411653 (2008-08-01), Hoogendam et al.
patent: 7460207 (2008-12-01), Mizutani et al.
patent: 7462850 (2008-12-01), Banine et al.
patent: 7522259 (2009-04-01), Hazelton et al.
patent: 7522263 (2009-04-01), Van Mierlo et al.
patent: 7528929 (2009-05-01), Streefkerk et al.
patent: 7557900 (2009-07-01), Shiraishi
patent: 7628865 (2009-12-01), Singh
patent: 7630053 (2009-12-01), Kawamura
patent: 2002/0020821 (2002-02-01), Van Santen et al.
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2003/0123040 (2003-07-01), Almogy
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Derksen et al.
patent: 2004/0239954 (2004-12-01), Bischoff
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0018155 (2005-01-01), Cox et al.
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0030497 (2005-02-01), Nakamura
patent: 2005/0046813 (2005-03-01), Streefkerk et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0052632 (2005-03-01), Miyajima
patent: 2005/0094115 (2005-05-01), Taniguchi et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0094125 (2005-05-01), Arai
patent: 2005/0122505 (2005-06-01), Miyajima
patent: 2005/0132914 (2005-06-01), Mulkens et al.
patent: 2005/0134817 (2005-06-01), Nakamura
patent: 2005/0140948 (2005-06-01), Tokita
patent: 2005/0145803 (2005-07-01), Hakey et al.
patent: 2005/0146693 (2005-07-01), Ohsaki
patent: 2005/0146694 (2005-07-01), Tokita
patent: 2005/0151942 (2005-07-01), Kawashima
patent: 2005/0155623 (2005-07-01), Kume
patent: 2005/0200815 (2005-09-01), Akamatsu
patent: 2005/0213065 (2005-09-01), Kitaoka
patent: 2005/0213066 (2005-09-01), Sumiyoshi
patent: 2005/0219489 (2005-10-01), Nei et al.
patent: 2005/0225734 (2005-10-01), De Smit et al.
patent: 2005/0233081 (2005-10-01), Tokita
patent: 2005/0270505 (2005-12-01), Smith
patent: 2005/0274898 (2005-12-01), Watanabe et al.
patent: 2006/0028628 (2006-02-01), Lin et al.
patent: 2006/0028632 (2006-02-01), Hazelton et al.
patent: 2006/0050351 (2006-03-01), Higashiki
patent: 2006/0103818 (2006-05-01), Holmes et al.
patent: 2006/0132731 (2006-06-01), Jansen et al.
patent: 2006/0232757 (2006-10-01), Tani et al.
patent: 2006/0250588 (2006-11-01), Brandl
patent: 2006/0256316 (2006-11-01), Tanno et al.
patent: 2007/0002296 (2007-01-01), Chang et al.
patent: 2007/0064215 (2007-03-01), Dirksen et al.
patent: 2007/0076197 (2007-04-01), Koga
patent: 2007/0085989 (2007-04-01), Nagahashi et al.
patent: 2007/0091287 (2007-04-01), Chang et al.
patent: 2007/0127001 (2007-06-01), Van Der Hoeven
patent: 2007/0146658 (2007-06-01), Van Mierlo et al.
patent: 2007/0172234 (2007-07-01), Shigemori et al.
patent: 2007/0206279 (2007-09-01), Brueck et al.
patent: 2007/0247600 (2007-10-01), Kobayashi et al.
patent: 2007/0253710 (2007-11-01), Kaneyama et al.
patent: 2007/0258072 (2007-11-01), Nagasaka et al.
patent: 2007/0274711 (2007-11-01), Kaneyama et al.
patent: 2007/0285631 (2007-12-01), Stavenga
patent: 2008/0002162 (2008-01-01), Jansen et al.
patent: 2008/0049201 (2008-02-01), Stavenga
patent: 2008/0218712 (2008-09-01), Compen et al.
patent: 2008/0271750 (2008-11-01), Jansen et al.
patent: 2008/0284990 (2008-11-01), De Jong et al.
patent: 2009/0015804 (2009-01-01), De Jong et al.
patent: 2009/0025753 (2009-01-01), De Jong et al.
patent: 2009/0027635 (2009-01-01), De Jong et al.
patent: 2009/0027636 (2009-01-01), Leenders et al.
patent: 2009/0086175 (2009-04-01), Streefkerk et al.
patent: 2009/0091716 (2009-04-01), Kadijk et al.
patent: 2009/0174870 (2009-07-01), De Jong et al.
patent: 2009/0174871 (2009-07-01), De Jong et al.
patent: 2009/0190105 (2009-07-01), De Jong
patent: 2009/0195761 (2009-08-01), De Graaf et al.
patent: 1963673 (2007-05-01), None
patent: 206 607 (1984-02-01), None
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 242 880 (1987-02-01), None
patent: 0023231 (1981-02-01), None
patent: 0418427 (1991-03-01), None
patent: 1039511 (2000-09-01), None
patent: 1 420 300 (2004-05-01), None
patent: 1 420 300 (2005-08-01), None
patent: 2474708 (1981-07-01), None
patent: 58-202448 (1983-11-01), None
patent: 62-065326 (1987-03-01), None
patent: 62-121417 (1987-06-01), None
patent: 63-157419 (1988-06-01), None
patent: 04-305915 (1992-10-01), None
patent: 04-305917 (1992-10-01), None
patent: 06-124873 (1994-05-01), None
patent: 07-132262 (1995-05-01), None
patent: 07-220990 (1995-08-01), None
patent: 10-228661 (1998-08-01), None
patent: 10-255319 (1998-09-01), None
patent: 10-303114 (1998-11-01), None
patent: 10-340846 (1998-12-01), None
patent: 11-176727 (1999-07-01), None
patent: 2000-058436 (2000-02-01), None
patent: 2000-323396 (2000-11-01), None
patent: 2001-091849 (2001-04-01), None
patent: 2004-193252 (2004-07-01), None
patent: 2005-072404 (2005-03-01), None
patent: 2005-079222 (2005-03-01), None
patent: 2006-134999 (2006-05-01), None
patent: 2006-310706 (2006-11-01), None
patent: 2007-029973 (2007-02-01), None
patent: 2007-088328 (2007-04-01), None
patent: 2007-142217 (2007-06-01), None
patent: 2007-150102 (2007-06-01), None
patent: 2007-227543 (2007-09-01), None
patent: 2007-227580 (2007-09-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 2004/053596 (2004-06-01), None
patent: WO 2004/053950 (2004-06-01), None
patent: WO 2004/053951 (2004-06-01), None
patent: WO 2004/053952 (2004-06-01), None
patent: WO 2004/053953 (2004-06-01), None
patent: WO 2004/053954 (2004-06-01), None
patent: WO 2004/053955 (2004-06-01), None
patent: WO 2004/053956 (2004-06-01), None
patent: WO 2004/053957 (2004-06-01), None
patent: WO 2004/053958 (2004-06-01), None
patent: WO 2004/053959 (2004-06-01), None
patent: WO 2004/055803 (2004-07-01), None
patent: WO 2004
Beeren Raymond Gerardus Marius
De Jong Anthonius Martinus Cornelis Petrus
Hoekerd Kornelis Tijmen
Jansen Bauke
ASML Netherlands B.V.
Coleman Ryan
Kornakov Michael
Pillsbury Winthdrop Shaw Pittman LLP
LandOfFree
Cleaning device, a lithographic apparatus and a lithographic... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Cleaning device, a lithographic apparatus and a lithographic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cleaning device, a lithographic apparatus and a lithographic... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2743020