Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
Patent
1991-11-15
1993-02-23
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
Sequential work treating receptacles or stations with means...
134133, 134902, 454 57, 454191, B08B 308, B08B 1500
Patent
active
051881365
ABSTRACT:
A cleaning device in the present invention comprises cleaning chambers each for cleaning subjects to be cleaned, transport units for transporting the subjects, transport chambers each having one of the transport units, first decompression means for decompressing each of the transport chambers to keep its internal atmospheric pressure lower than the external atmospheric pressure of the cleaning device by 0 through 0.02 mmH.sub.2 O, and second decompression means for decompressing each of the cleaning chambers to keep its internal atmospheric pressure lower than the internal atmospheric pressure of each of the transport chambers by 0 through 0.02 mmH.sub.2 O.
REFERENCES:
patent: 4282825 (1981-08-01), Nagatomo et al.
patent: 4506687 (1985-03-01), Rosch, III
patent: 4696226 (1987-09-01), Witmer
patent: 4736758 (1988-04-01), Kusuhara
patent: 4823680 (1989-04-01), Nowotarski
patent: 5099751 (1992-03-01), Newman et al.
Coe Philip R.
Tokyo Electron Limited
LandOfFree
Cleaning device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Cleaning device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cleaning device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2198380