Cleaning device

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...

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Details

134133, 134902, 454 57, 454191, B08B 308, B08B 1500

Patent

active

051881365

ABSTRACT:
A cleaning device in the present invention comprises cleaning chambers each for cleaning subjects to be cleaned, transport units for transporting the subjects, transport chambers each having one of the transport units, first decompression means for decompressing each of the transport chambers to keep its internal atmospheric pressure lower than the external atmospheric pressure of the cleaning device by 0 through 0.02 mmH.sub.2 O, and second decompression means for decompressing each of the cleaning chambers to keep its internal atmospheric pressure lower than the internal atmospheric pressure of each of the transport chambers by 0 through 0.02 mmH.sub.2 O.

REFERENCES:
patent: 4282825 (1981-08-01), Nagatomo et al.
patent: 4506687 (1985-03-01), Rosch, III
patent: 4696226 (1987-09-01), Witmer
patent: 4736758 (1988-04-01), Kusuhara
patent: 4823680 (1989-04-01), Nowotarski
patent: 5099751 (1992-03-01), Newman et al.

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