Cleaning and liquid contact with solids – Apparatus – Automatic controls
Patent
1992-04-23
1994-04-05
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
Automatic controls
134 991, 134111, 134902, 454187, B08B 304
Patent
active
052995844
ABSTRACT:
A cleaning device comprises at least one cleaning tub containing a cleaning liquid, a chamber housing the cleaning tub, a mechanism for taking an article to be cleaned in/out of the cleaning liquid in the cleaning tub, and a shutter for shutting the inside of the chamber from the outside thereof. The shutter opens when a cleaned material is conveyed in/out of the chamber, thereby passing the cleaned material there through. A clean air supplying unit for forming downflow of clean air around the cleaning tub is provided on the upper portion of the chamber. A exhausting unit for sucking the clean air passing around the cleaning tub and exhausting the air out of the chamber is provided on the lower portion of the chamber.
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Izumi Sinitirou
Miyazaki Takanori
Coe Philip R.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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