Cleaning compositions for removing etching residue and method of

Details Cleaning compositions for removing etching residue and method of Cleaning compositions for removing etching residue and method of

1998-08-13

2000-10-31

Delcotto, Gregory R.

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

510178, 510434, 510489, 510499, 510245, 510254, C11D 330, C11D 320, C11D 343

Patent

active

061402877

ABSTRACT:
An etching residue remover for cleaning etching residue from a substrate, derived from a mixture of at least hydroxylamine, an alkanolamine which is miscible with said hydroxylamine, water, and, optionally, a chelating agent, wherein the hydroxylamine and the alkanolamine are present in amounts sufficient to clean etching residue from the substrate.

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