Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2007-04-17
2007-04-17
Del Cotto, Gregory R. (Department: 1751)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C510S245000, C510S255000, C510S264000, C510S499000, C134S001200, C134S001300
Reexamination Certificate
active
10630300
ABSTRACT:
A remover composition and method for removing resists from substrates containing nucleophilic amine and at least one solvent is described. Optionally, a chelating agent can also be included in the remover composition. The remover composition is especially suitable for removing a variety of resists from substrates at different stages in the process of manufacturing integrated circuits.
REFERENCES:
patent: 3160539 (1964-12-01), Hall et al.
patent: 3530186 (1970-09-01), Greco
patent: 3582401 (1971-06-01), Berilla et al.
patent: 3615825 (1971-10-01), Gansser
patent: 3619390 (1971-11-01), Dillenberg
patent: 3640810 (1972-02-01), Plasynski et al.
patent: 3649395 (1972-03-01), Lee
patent: 3753933 (1973-08-01), Olstowski et al.
patent: 3914185 (1975-10-01), Inamorato
patent: 3972839 (1976-08-01), Murphy
patent: 4067690 (1978-01-01), Cuisia et al.
patent: 4078102 (1978-03-01), Bendz et al.
patent: 4111767 (1978-09-01), Kawagishi et al.
patent: 4155866 (1979-05-01), Berkenblit et al.
patent: 4165294 (1979-08-01), Vander Mey
patent: 4170478 (1979-10-01), Case et al.
patent: 4187140 (1980-02-01), Berkenblit et al.
patent: 4221674 (1980-09-01), Vander Mey
patent: 4238275 (1980-12-01), Shih
patent: 4239661 (1980-12-01), Muroaka et al.
patent: 4242218 (1980-12-01), Vander Mey
patent: 4264716 (1981-04-01), Vincent et al.
patent: 4268406 (1981-05-01), O'Brien et al.
patent: 4276185 (1981-06-01), Martin
patent: 4276186 (1981-06-01), Bakos et al.
patent: 4278635 (1981-07-01), Kerst
patent: 4279870 (1981-07-01), Natansohn et al.
patent: RE30714 (1981-08-01), Harriman et al.
patent: 4282111 (1981-08-01), Ciuba
patent: 4284435 (1981-08-01), Fox
patent: 4289645 (1981-09-01), Muccitelli
patent: RE30796 (1981-11-01), Lesinski
patent: 4350606 (1982-09-01), Cuisia et al.
patent: 4363741 (1982-12-01), Gould
patent: 4395348 (1983-07-01), Lee
patent: 4395479 (1983-07-01), Ward et al.
patent: 4401747 (1983-08-01), Ward, Jr. et al.
patent: 4403029 (1983-09-01), Ward, Jr. et al.
patent: 4428871 (1984-01-01), Ward et al.
patent: 4482626 (1984-11-01), Twist et al.
patent: 4509989 (1985-04-01), Sumansky
patent: 4539230 (1985-09-01), Shimizu et al.
patent: 4549968 (1985-10-01), Muccitelli
patent: 4554049 (1985-11-01), Bastenbeck
patent: 4617251 (1986-10-01), Sizensky
patent: 4626411 (1986-12-01), Nemes et al.
patent: 4699868 (1987-10-01), Sabongi
patent: 4732887 (1988-03-01), Obanawa et al.
patent: 4737195 (1988-04-01), Carandang et al.
patent: 4744834 (1988-05-01), Haq
patent: 4765844 (1988-08-01), Merrem et al.
patent: 4770713 (1988-09-01), Ward
patent: 4786578 (1988-11-01), Neisius et al.
patent: 4824489 (1989-04-01), Cogan et al.
patent: 4824763 (1989-04-01), Lee
patent: 4834912 (1989-05-01), Hodgens, II et al.
patent: 4861386 (1989-08-01), Hoy
patent: 4873136 (1989-10-01), Foust et al.
patent: 4895703 (1990-01-01), Zupanovich et al.
patent: 4929301 (1990-05-01), Beechko
patent: 4941941 (1990-07-01), Austin et al.
patent: 4980077 (1990-12-01), Morris et al.
patent: 5015298 (1991-05-01), Arrington
patent: 5022926 (1991-06-01), Kreh et al.
patent: 5043252 (1991-08-01), Akiyama et al.
patent: 5049201 (1991-09-01), Cheng et al.
patent: 5073622 (1991-12-01), Wojtech et al.
patent: 5091103 (1992-02-01), Dean et al.
patent: 5091108 (1992-02-01), Harder et al.
patent: 5094814 (1992-03-01), Soderquist et al.
patent: 5143592 (1992-09-01), Toro
patent: 5185235 (1993-02-01), Sato et al.
patent: 5279771 (1994-01-01), Lee
patent: 5288332 (1994-02-01), Pastilnik et al.
patent: 5290361 (1994-03-01), Hayashida et al.
patent: 5308745 (1994-05-01), Schwartzkopf
patent: 5334332 (1994-08-01), Lee
patent: 5374454 (1994-12-01), Bickford et al.
patent: 5381807 (1995-01-01), Lee
patent: 5399464 (1995-03-01), Lee
patent: 5407788 (1995-04-01), Fang
patent: 5419779 (1995-05-01), Ward
patent: 5482566 (1996-01-01), Lee
patent: 5672577 (1997-09-01), Lee
patent: 5746837 (1998-05-01), Beck et al.
patent: 5792274 (1998-08-01), Tanabe et al.
patent: 5795702 (1998-08-01), Tanabe et al.
patent: 5798323 (1998-08-01), Honda et al.
patent: 5911835 (1999-06-01), Lee et al.
patent: 5968848 (1999-10-01), Tanabe et al.
patent: 6000411 (1999-12-01), Lee
patent: 6068000 (2000-05-01), Tanabe et al.
patent: 6110881 (2000-08-01), Lee et al.
patent: 6121217 (2000-09-01), Lee
patent: 6276372 (2001-08-01), Lee
patent: 6399551 (2002-06-01), Lee
patent: 0299166 (1989-01-01), None
patent: 0300463 (1989-01-01), None
patent: 0301756 (1989-02-01), None
patent: 0336400 (1989-10-01), None
patent: 0485161 (1992-05-01), None
patent: 578507 (1994-01-01), None
patent: 1144481 (1969-03-01), None
patent: 2157670 (1985-10-01), None
patent: 55-52379 (1980-04-01), None
patent: 56-5899 (1981-01-01), None
patent: 62-49355 (1987-03-01), None
patent: 62-95531 (1987-05-01), None
patent: 63-183445 (1988-07-01), None
patent: 1-105949 (1989-04-01), None
patent: 1-159388 (1989-06-01), None
patent: 545894 (1993-02-01), None
patent: 5-259066 (1993-10-01), None
patent: 64-21088 (1998-01-01), None
patent: 1244211 (1986-07-01), None
World Patent Index 87-077755 re SU-A-1244211.
Material Safety Data Sheet—3 pages.
Material Safety Data Sheet, Experimental Stripper, WMX-225 (1 sheet).
Material Safety Data Sheet, Experimental Stripper, WMX-230 (1 sheet).
“Reactions of Catechol,” Crown Zellerbach Corp., Chemical Products Division, Camas, Washington 98607 (pp. 1-33 w/Cover Sheet and Table of Contents).
Pai, et al., “Metal Corrosion in Wet Resist Stripping Process,” Microelectronic Mfg. and Testing, Feb. 1990, pp. 37-39.
Del Cotto Gregory R.
EKC Technology, Inc.
Morgan & Lewis & Bockius, LLP
LandOfFree
Cleaning compositions and methods of use thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Cleaning compositions and methods of use thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cleaning compositions and methods of use thereof will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3802538