Cleaning composition comprising a chelant and quaternary...

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...

Reexamination Certificate

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C510S175000, C510S480000, C510S504000, C134S001300

Reexamination Certificate

active

07825079

ABSTRACT:
The invention relates to compositions and methods for cleaning integrated circuit substrates. The compositions are in the form of an aqueous solution and include a quaternary ammonium hydroxide compound and a chelating compound. The chelating compound includes either boric acid or at least one N-substituted aminocarboxylate selected from the group consisting of N-bis(2-hydroxyethyl)glycine(bicine), N-tris(hydroxymethyl)methyl glycine (tricine) and mixtures thereof, and can optionally include glycine, Iminodiacetic acid (IDA), Nitrilo trizacetic acid (NTA), Ethylenediammine Tetraacetic acid (EDTA), or mixtures thereof.

REFERENCES:
patent: 5174872 (1992-12-01), Scott
patent: 5759369 (1998-06-01), Menchen et al.
patent: 2004/0180300 (2004-09-01), Minsek et al.
patent: 2004/0224866 (2004-11-01), Matsunaga et al.
patent: 2009/0131295 (2009-05-01), Cui
patent: 2009/0137191 (2009-05-01), Lee
patent: 2009/0203566 (2009-08-01), Lee et al.
patent: 2009/0215658 (2009-08-01), Minsek et al.

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