Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2008-04-08
2008-04-08
Webb, Gregory (Department: 1796)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C134S001300, C438S692000
Reexamination Certificate
active
07354890
ABSTRACT:
Cleaning compositions composed of specific amounts of carbonic acid and/or carbonate, hydrogen peroxide, aluminum fluoride and water are highly effective for cleaning electronic devices of resist, resist residues, titanium dioxide, aluminum oxide and silicon dioxide. The compositions contain no hydroxylamine and are thus free of its hazards.
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Hara Yasushi
Hayashi Hiroaki
Shimono Akinori
Takahashi Fumiharu
Sughrue & Mion, PLLC
Tosoh Corporation
Webb Gregory
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