Cleaning apparatus having fluid mixing nozzle for...

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...

Reexamination Certificate

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Reexamination Certificate

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07152613

ABSTRACT:
Provided is a cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus for cleaning a glass plate used in the manufacture of a flat-panel display and which mixes a cleaning fluid with a gas and sprays the mixture uniformly on the entire surface of a glass plate, thereby providing superior cleaning effects with a minimum amount of cleaning fluid. The fluid mixing nozzle includes a nozzle in the shape of a rectangle, which mixes a cleaning fluid and a pressured gas and sprays a mixture on the flat-panel display. By tightening the nozzle in a direction of the short axis of the nozzle with use of streamlined structures at a predetermined interval, it is possible to prevent a gap of the nozzle from being elastically deformed. Even with a small amount of cleaning fluid, it is possible for the mixture to be sprayed uniformly on the entire surface of the flat-panel display and for the cleaning effects of a glass plate used in manufacturing the flat-panel display to be improved.

REFERENCES:
patent: 4787404 (1988-11-01), Klosterman et al.
patent: 5730806 (1998-03-01), Caimi et al.
patent: 6375088 (2002-04-01), Warrick

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