Brushing – scrubbing – and general cleaning – Machines – Wiping
Patent
1999-06-22
2000-12-26
Till, Terrence R.
Brushing, scrubbing, and general cleaning
Machines
Wiping
15 883, B08B 300, B08B 312
Patent
active
061639168
ABSTRACT:
A cleaning apparatus for cleaning disk-shaped workpieces while positively rotating them by a large driving force is equipped with a simple, efficient driving means, a cleaning mechanism 18 for cleaning workpieces W individually formed of an endless driving belt 19 for forcibly rotating a workpiece around an axis, and a pair of cleaning rollers 20 and 20 for clamping both surfaces of a rotating workpiece W from both sides to clean it, the driving belt 19 being curved in the circumferential direction of the workpiece W so as to be brought into linear contact with the outer periphery of the workpiece W.
REFERENCES:
patent: 5868857 (1999-02-01), Moinpour et al.
patent: 5875507 (1999-03-01), Stephens et al.
patent: 5975094 (1999-11-01), Shurtliff
patent: 6052855 (2000-04-01), Terui
patent: 6082377 (2000-07-01), Frey
patent: 6101656 (2000-08-01), Lee et al.
Sato Hiroji
Terui Yoshinobu
Speedfam Clean System Co., Ltd.
Till Terrence R.
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