Cleaning apparatus and method and computer readable medium

Details Cleaning apparatus and method and computer readable medium Cleaning apparatus and method and computer readable medium

2007-10-22

2011-10-25

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S030000, C134S033000, C134S034000, C134S036000, C134S037000

Reexamination Certificate

active

08043440

ABSTRACT:
A control mechanism of a cleaning apparatus is preset to control the apparatus for a cleaning process or a rinsing process to include delivering a process liquid, which is corresponding one of a cleaning liquid and a rinsing liquid, from a back surface liquid supply nozzle through a liquid delivery port, thereby forming a liquid film on the back surface of a substrate, and then once stopping and then re-starting delivery of the process liquid from the back surface liquid supply nozzle, thereby forming a liquid film also on a portion around the liquid delivery port, so as to process the portion around the liquid delivery port as well as the substrate.

REFERENCES:
patent: 6227786 (2001-05-01), Tateyama
patent: 2002/0096196 (2002-07-01), Toshima et al.
patent: 2006/0219264 (2006-10-01), Miya
patent: 9-298181 (1997-11-01), None

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