Cleaning apparatus and cleaning method

Details Cleaning apparatus and cleaning method Cleaning apparatus and cleaning method

2007-09-04

2007-09-04

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Processes

With treating fluid motion

C134S027000, C134S028000, C134S029000, C134S026000

Reexamination Certificate

active

10614295

ABSTRACT:
A cleaning apparatus and a cleaning method wherein cleaning and drying can be carried out in the same cleaning apparatus without the risk of reverse contamination of the cleaned object after the drying process. The cleaning apparatus includes a supporting device for supporting an object to be cleaned, and a cleaning cup surrounding the supporting device to prevent splashing of a cleaning liquid. The cleaning apparatus includes a cleaning device for cleaning an inner wall of the cleaning cup with a cleaning liquid.

REFERENCES:
patent: 5265632 (1993-11-01), Nishi
patent: 5923915 (1999-07-01), Akimoto et al.
patent: 6432199 (2002-08-01), Takekuma
patent: 6494220 (2002-12-01), Matsuda et al.
patent: 6516815 (2003-02-01), Stevens et al.
patent: 6945259 (2005-09-01), Masui et al.
patent: 363173327 (1988-07-01), None
patent: 08-323302 (1996-12-01), None
patent: 9-290199 (1997-11-01), None

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