Cleaning apparatus

Details Cleaning apparatus Cleaning apparatus

2005-08-30

2008-12-09

Barr, Michael (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

Having self cleaning means

C134S021000, C134S102200, C134S108000, C134S902000

Reexamination Certificate

active

07461663

ABSTRACT:
The cleaning apparatus of the invention includes first and second cleaning tanks cleaning a mask with a predetermined cleaning solution, a vacuum evaporator vacuum-distilling the cleaning solution of the first and second cleaning tanks, a first cooler cooling the vacuum-distilled cleaning solution to room temperature, a first return pipe returning the cleaning solution cooled by the first cooler to the second cleaning tank, first and second rinse tanks rinsing the mask with a predetermined rinse solution, an atmospheric evaporator distilling the rinse solution of the first and second rinse tanks at atmospheric pressure, a second cooler cooling the rinse solution distilled at atmospheric pressure to room temperature, and a second return pipe returning the rinse solution cooled by the second cooler to the second rinse tank.

REFERENCES:
patent: 349828 (1886-09-01), Vittorio
patent: 4693777 (1987-09-01), Hazano et al.
patent: 4867186 (1989-09-01), Otsuka
patent: 5937675 (1999-08-01), Stucker
patent: 6076537 (2000-06-01), Brink et al.
patent: 6612317 (2003-09-01), Costantini et al.
patent: 2005/0121144 (2005-06-01), Edo et al.
patent: 2006/0042669 (2006-03-01), Kinomura et al.
patent: 2007/0289604 (2007-12-01), Fukunaga et al.
patent: 2004-103269 (2004-04-01), None

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